ANALYSIS AND MODELING OF FREQUENCY-DEPENDENT RESISTANCE AND INDUCTANCE OF SINGLE CMOS INTERCONNECTS
Keywords:Analytic formulas, on-chip interconnects, silicon substrate, eddy currents, complex image technique
A simple, efficient CAD-oriented analytic modeling approach to calculate frequency-dependent distributed inductance and associated distributed series resistance per-unit-length of single on-chip interconnects on a lossy silicon substrate is presented. The closed-form formulas for the frequency-dependent series impedance parameters are obtained using vector magnetic potential equation and a complex image technique. The proposed frequency-dependent inductance L(w) and resistance R(w) per-unit-length formulas are shown to be in good agreement with the electromagnetic solutions.
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